First, clean room notes
1. Before entering the cleanroom, you must notify the administrator, and through basic training.
2. Go to the clean room non-smoking, eat (drink) food, foreign matter (such as newspapers, magazines, pencils ... etc.) can not be brought into, and are prohibited from frivolity run and reunion talk.
3. Before entering the clean room, to be prescribed in place off your shoes, the shoe is placed inside the shoe, coat placed in the wardrobe, personal items placed in a private cabinet, the cabinet can not be placed food.
4. Clean Room must first enter the locker room, the masks, dust cap, clean clothing and shoe covers in accordance with procedures prescribed dressed, and then by air dust collector dust collector chamber, and treading the carpet dust (the dust collector chamber floor) Square It was entered.
5. wear masks, masks should be worn over the nose, mouth to nostril cover principle, in order to avoid breathing contaminated chips.
6. wearing clean clothes, clean clothing and hair cap should be preceded by consolidation, in order to avoid the post on clean clothing, and a sense of discomfort can not sort out.
7. After the purge appearance, first wearing a dust cap, dust cap worn principle lines:
(1) Hair must be completely covered within the cap can not be exposed.
(2) Clean the hem of the cap to level scattered on top of the shoulders, put on work clothes, get rid of the party will not be under bare shoulder and neck.
8. Clean cap after wearing properly, then the clean clothes, clean clothes should Chiduo appropriate, so as not to have too short sleeves and pants or bare skin at risk, should pay attention to dress hem should cap the level of protection state, non-reversible wear clean clothes.
9. wearing clean clothes, only the shoe, shoe and shoe pull leveling, indeed cover over his pants.
10. should wear gloves to avoid touching the palm of the hand to the light and the fingertips of gloves (to prevent sodium ion contamination), after wearing gloves, should be placed in the sleeves of wrist gloves, to keep out pollution.
11. Clean clothes properly, the welcome home and stampede dust blanket party may enter the clean room.
12. Regardless of entering or leaving the clean room, subject to the provisions of clean clothes off in the locker room, whom in other areas can not, especially not be in a clean room walking off.
13. clean clothing, shoes, etc., should be cleaned regularly, damaged, when off-line, should immediately be replaced.
14. When off clean clothing, and wearing the order reversed.
15. clean clothes should hang off the good, and put it in the locker room in the upper chest; shoe should be placed beneath the crane good clean clothes.
16. A small cabinet inside the locker room, put clean clothes, etc. in addition to the provisions of article shall not place other items.
17. Except as provided in the paper and items, other items not and will not be brought into the clean room.
18. clean clothes, etc. not to carry out the clean room, with Bi placed in a predetermined place.
19. masks and gloves visual condition themselves in the custody or reused.
20. Any thing into the clean room, must be used as alcohol wipe clean.
21. Any entering the device, please notify the administrator, in a clean outdoor wipe clean before entering.
22. did not pass the examination of the instrument, prohibit the use, in case of emergency, may, in accordance Emergency procedures for proper treatment, such as turning off water, electricity, gas and other switches.
23. The clean room must not flare up, to avoid accidents.
Second, the cleanroom operating instructions
1. When processing chip, no fiber must wear gloves, use washed clean forceps hostage chip, do something with your fingers or any other contactless chip, the chip was touching contaminated shall be cleaned party may continue to use:
(1) Any one forceps front end (ie hostage chip end) as to be touched before, forceps or fall to the ground, do not have to wash them with a paper towel or cloth dirty tweezers.
Before the next program (2) chip washing, if they are finger touch too, must be re-cleaned.
(3) The chip is placed on a quartz boat, in preparation into the tube, if found to have defaced the tweezers conspicuous phenomenon or pollution caused by the forceps on the chip, the chip must be re-cleaned and replaced immediately using clean forceps .
2. The chip must be placed in the box, cover up and stored in a predetermined position, and do not expose it.
3. Avoid talking on the chip, in order to prevent splashing saliva on the chip, the chip into the diffusion furnace, please pay special attention to prevent the operation generated, if stained lint on the chip, the spray gun with nitrogen.
4. From the Teflon (Teflon) crystal boat, quartz boat (Quartz Boat) and other carrier (Carrier) on when removing the chip, must be vertically upwards Xieqi avoid scratching chip, chip away microscope lens indeed before chip removed from the suction seat.
5. chip, if it has a long upper oxide layer, before sending the yellow room Do not use a diamond knife on the chip mark.
6. operation, whether or not wear gloves, wash hands must not be put into the sink.
7. When using chemical station or oven processing chip, the chip must be placed in Teflon wafer boat inside, do not use plastic box.
8. chip placement quartz boat, if the chips fall on the ground or in the hands of the chip must be re-cleaned, and then into the oxidation furnace.
9. Do not touch the chip inside the box, if they are touched or broken chips contaminated and must redo the cleaning.
10. gloves, paper and other offal things, do not left in the console, glove if burned, torn or more fiber qualitative change must be replaced.
11. Non been instructed never to open unfamiliar instruments and various switching valve control knob or handle.
12. strange smell or abnormal reaction solution, color, sound, etc. Please notify relevant personnel.
13. instrument for any damage due to an error during operation, be sure to inform the responsible officer or teacher immediately.
14. Chip boxes out of the clean room must be kept clean and in plastic wrap packaging, and offenders may not enter.
15. Always use a clean room and clean notebook pen to take notes, generally can not be brought into the paper and pencil.
Third, the yellow zone operating instructions
1. Humidity and temperature can affect the alignment work in the yellow zone should be noted that the temperature and humidity, and should reduce the aligner people in the vicinity, in order to reduce the humidity, temperature changes.
Not exposed photoresist duly completed 2. chips can not carry out the yellow area in order to avoid sensitive.
3. has been properly resist, while waiting for the alignment of the exposure of the chip should be placed in the blue opaque black crystal box, the lid must be properly covered.
The mask should be held to take the edge using not touch the mask surface, under any condition, no contact with the chromium film mask something else, to prevent scratches, dust mask it can blow the nitrogen gun.
5. exposure, avoid eye contact with mercury exposure.
Fourth, the forceps Instructions
1. After entering the laboratory, after should wear gloves, then take tweezers, to avoid contamination.
2. Only use clean forceps, before holding to take the chip, tweezers, once off the ground or hand touch, or who were contaminated due to other reasons, must wash them before re-use.
3. forceps use, should be put in place provisions for each station, can not arbitrarily placed, if there are special processes tweezers, shall maintain their own after use, and the laboratory can not mix the use of forceps each station.
4. The holding forceps should be adopted "to hold a pen-style" position relying take chips.
5. relying take the chip, after the order by relying take forward, when back in the chip, by the back back before, so as not to scratch the surface of the chip.
6. rely on to take the chip, the "short side" (saw-shaped head) placed chip front, "Long Edge" (flat) on the back of the chip, relying on a blank part of the chip, the chip can not hurt.
7. Never forceps contact with acid tank or DI Water tank.
8. The forceps can only be taken as a chip laden with, are not allowed to do other purposes.
Fifth, chemical Instructions
1. chemicals out to be registered and notified the manager, together with material safety data sheets (MSDS) for laboratory door.
2. Before the use of chemicals, Please read the Material Safety Data Sheet (MSDS), and inform the administrator.
3. Before changing acid must first be wearing anti-acid plastic skirt, put on anti-acid-sleeved gloves, wearing goggles, anti-acid plastic feet with shoes, before they can be carried out to change the acid job.
4. Open the acid bottle shall be arbitrarily lid, the locking cap immediately after use.
5. dilute acid, do remember adding acid to water, not water to the acid can be added.
6. Do not taste or smell any chemicals used to determine the drug within the container.
7. A container is unknown what drugs when, Do not shake or invert the container.
8. All chemicals shall be of whom work in a well-ventilated place or exhaust.
Must read through various practices 9. When the operation of the acid.
10. The acids and bases can be stored in common storage cabinets have ventilation equipment, but must not be stored together with organic solvents.
11. Please put waste acid barrels of waste acid, non-arbitrary dumping, but not mixed with an organic solution.
12. Waste organic solution set into the organic waste containers and must not be dumped into the waste acid or bucket.
13. Do not replace any solution within the container.
14. I want to bring into the solution on their own request after prior notification under license to bring in, bring yourself into the solution if I want to have a dangerous, you must evaluate before they brought in after, and please clearly indicate the contents of the container vessel and save the term.
15. Waste Processing: Waste fraction acid, alkali, hydrofluoric acid, organic, etc., separately and registration, clearly marked recycling bins, waste containers containing hydrofluoric acid, absolutely not hand touch.
16. leak or leak acid treatment: When leak or leak acid, in order to ensure safe, absolutely not hand touch, first turn off the power switch associated with the valve, then clean cloth or acid adsorption processing of, and report equipment manager.
Sixth, the ChemStation operator
1. When operating in accordance with the provisions to be, put on rubber gloves and masks.
2. must not be placed in plastic boxes or acid tank cleaning tank.
3. Before adding any solution, be sure to confirm in advance the solvent in the container before adding.
4. Develop good working posture ChemStation work should in the upper body should be avoided above the chemical tank and rake to the cleaning tank, on the one hand prevents the danger, on the other hand also reduce the chance of contamination.
5. Chemical station is not operating, a covered person shall keep the cap properly, clean water tank switch is turned on.
6. chemical splashed on clothes, skin, face, the eye should be rinsed with water splash injury that is part of 15 minutes or more, and must be skin color returned to normal, and immediately arranged emergency treatment.
7. The Chemical leak should respond quickly and make the appropriate treatment, if any should be evacuated to evacuate according to the instructions.
8. The use of rubber gloves on the ChemStation, avoid touching each machine and table, and other appliances and other things, general operations, please wear clean gloves.
Seven, RCA Method
1.DI Water 5min
2.H2SO4: H2O2 = 3: 1 cook 10 ~ 20min 75 ~ 85 ℃, to metal, organic, oil
3.DI Water 5min
4.HF: H2O 10 ~ 30sec, go native oxide layer (Native Oxide)
5.DI Water 5min
6.NH4OH: H2O2; H2O = 1: 1: 5 and cook 10 ~ 20min 75 ~ 85 ℃, go organometallic
7.DI Water 5min
8.HCl: H2O2: H2O = 1: 1: 6 and cook 10 ~ 20min 75 ~ 85 ℃ deionized
9.DI Water 5min
10.Spin Dry
Eight, Cleaning Precautions
1. the first pour water, H2O2 last fall, figure than the volume ratio.
2. Organic and acid-base must not be mixed, be sure to use separate operating platforms.
After cooling, etc. 3. The acid solution into the recovery tank, and DI Water rushed glass 5 min.
4. acid bottles with water after washing, and according to plastic bottles, glass bottles placed in separate outdoor Recycle Bin.
5. hydrofluoric acid will corrode the bones, if met immediately add calcium water with grape smear, then rinse with water, and seek medical advice. Other acid-base hit immediately wash with a lot of DI Water.
6. Wafer cleaning after the try to put DI Water avoid contamination.
7. Easy to 1-2-9-10 washing step; washing step 1-2-10 SiO2; Al washing with HCl: H2O = 1: 1.
8. positive photoresist removal step of 1-2-10, or immersion ACE to ultrasonic oscillations.
9. Each slot has a specific glass or to install the solution, etching, cleaning, electroplating, organic must not be mixed.
10. Waste recycling points acids, alkalis, hydrofluoric acid, electroplating, organic five separate recovered and recorded before dumping waste check compatibility table to determine the correct then pour